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UTVW-R2800H
   ԔB
UTVW-R2800Hc 
1 DSDDR_Mи߾
2 ɰ\2kg^خbƷҲɰ\
   Ԕ 1

̖ Model  UTVW-R2800H
еֱ״ Robot Type  4Բ 4 axis Cylindrical Coordinate

Operation Range

X-axis  680mm
-axis  330
Z-axis  50mm

ٶ

Max. Operation Speed

X, A-axis
 120/sec
-axis  80/sec
Z-axis  37.5mm/sec
ֽ     
Resolution
X, A-axis
 0.001mm/pulse or less
-axis  0.001/pulse
Z-axis  0.001mm/pulse
}λþ Repeatability  XYZ򣺸0.1mm
ɰ\ Payload  2kg (צ   including E/E)
Q Cleanliness  ISO Class 3 (ISO-14644)
w Mass  85kg
ҪOʩ Facilities Դ Power  Single phase 200-22010% VAC 3A
Oíh Environment ض Temperature  15-40 (Atmosphere side)/15-80 (Vacuum Seal Unit)
 Humidity  Atmospheric pressure 10-6Pa
1 ׷xr£\c׼һӡ

                A\Cе֣գ
                                 Substrate Size                Arm Model
                Wafer                200~300mm

UTV-R2700H 
UTV-RS2600W
UTVW-R2800H pdf


(bH)

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