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UTV-RS2600W
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4SA
UTV-RS2600Wϵеc
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 UTV-RS2600W

 UTV-RS2620W

 4SA

XS

 ֱۄǶ120deg.

 440mm

 545mm

S

 340deg.

ZS

 35mm

ٶȣMAX

X1X2S

 1000mm/sec.

S

 216deg/sec.

ZS

 75mm/sec.

ѭhrg
1

X1X2S

 1.1sec.

S

 2.2sec.

ZS

 1.1sec.

ֽ

XS

 0.001mm/pulse

S

 0.001deg./pulse

ZS

 0.001mm/pulse

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 0.2mm

 ISO Class 3 (ISO-14644)

 10-6 pa

ɰ\ֱۣ

 0.7kg

܇ض

 Ղȣ080  /ȣ040

 75kg

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                A\Cе֣գ
                                 Substrate Size                Arm Model
                Wafer                200~300mm

UTV-R2700H 
UTV-RS2600W
UTVW-R2800H pdf


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DAIHENӰ,Ƭ,ɫƬ,ʽ Ȩ   䰸̖KICP13025737̖     չ 32058102001225