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UT-AFX3000NM
   ԔB
UT-AFX3000NMic 
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   Ԕ 1

̖ Model  UT-AFX3000NM  UT-AFW3000NM
еֱ״ Robot Type  3-axis Cylindrical Coordinate  4-axis Cylindrical Coordinate

Operation Range

X1, X2-axis  500mm
-axis  340
Z-axis  300mm or 450mm

ٶ

Max. Operation Speed

X1, X2-axis  1000mm/sec
-axis  200/sec
Z-axis  250mm/sec
ʱ   
Cycle Time
X1, X2-axis
 1.0sec/500mm
-axis  2.2sec/340
Z-axis  1.5sec/300mm, 2.1sec/450mm
}λþ Repeatability

 XYZ򣺸0.1mm

 XYZ direction 0.1mm each 

ɰ\ Payload  0.5kg/arm (צ Including E/E)
Q Cleanliness  ISO Class 1 (ISO-14644)
w Mass  30kg  32kg
ҪOʩ Facilities

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Vacuum(for adsorption) 

 -80kPaG or less, 10NL/min

(CȲŚ)

Vacuum(for Purging)

 -80kPaG or less, 60NL/min
Դ Power  3-phase 200-23010% VAC, 50/60Hz, 5A
Oíh Environment ض Temperature  5-45
 Humidity  20-70% (޽¶)(No condensation)
1 ׷xr£\c׼һӡ

               A\Cе֣⣩
                                  Substrate Size               Arm Model                   Aligner Model          
                Wafer                 ~200mm UTC-R800pdf OFH-4102
                ~300mm

UT-AFX3000NMpdf
UTM-R3700F 

OFH-4100
EG-303 

(bH)

DAIHENӰ,Ƭ,ɫƬ,ʽ Ȩ   䰸̖KICP13025737̖     չ 32058102001225
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