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UTC-R800
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UTC-R800ϵеc
1fMECS˾UTC-800جFC
2Mp70%
3ȫ´dʾ
   Ԕ 1

̖ Model  UTC-R800
еֱ״ Robot Type  3Բ  3-axis Cylindrical Coordinate

Operation Range

X-axis  +220mm
-axis  360
Z-axis  170mm

ٶ

Max. Operation Speed

X-axis  330mm/sec
-axis  210/sec
Z-axis  70mm/sec
ֽ     
Resolution
X-axis
 0.01mm/pulse or less
-axis  0.0091/pulse
Z-axis  0.003mm/pulse
}λþ Repeatability  XYZ򣺸0.1mm
ɰ\ Payload  0.2kg (צ   including E/E)
Q Cleanliness  ISO Class 3 (ISO-14644)
w Mass  15kg
ҪOʩ Facilities  Vacuum  -80kPag or less, 10NL/min
Դ Power  100-115VAC (50/60kHz) 5A
Oíh Environment ض Temperature  0-40
 Humidity  70% or less (No condensation)
1 ׷xr£\c׼һӡ

               A\Cе֣⣩
                                  Substrate Size               Arm Model                   Aligner Model          
                Wafer                 ~200mm UTC-R800pdf OFH-4102
                ~300mm

UT-AFX3000NMpdf
UTM-R3700F 

OFH-4100
EG-303 

(bH)

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