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UTM-R3700F
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robotͺ Model UTM-R3700F
robot״ Robot Type 6ˮƽֱ 6-axis articulated system
Χ Operation Range X, A-axis 590mm
-axis 330deg.
Z-axis 310-703.8mm
Y-axis 767.5mm
߶ٶ Max. Operation Speed X, A-axis 1600mm/sec
-axis 540deg/sec
Z-axis 1500mm/sec
Y-axis 1500mm/sec
ֽ Resolution X, A-axis 0.001mm/pulse
-axis 0.001deg/pulse
Y-axis 0.001mm/pulse
Z-axis 0.001mm/pulse
ظλþ Repeatability 0.1mm
Cleanliness ISO Class 3 (ISO-14644
Ҫ Facilities Դ Power 3 Phases 200 VAC 20A
Vacuum -80kPa or less, 15NL/min
գx
CDA (Optional)
0.3-0.6MPa
ɰhand Payload (including E/E) 0.5kg/arm
Χ Environment ¶ Temperature 0-40deg.C
ʪ Humidity 70% or less (No condensation)
Mass Approx. 74kg

*1 Repeatability of 100 cycles operation including the CW and CCW approaches.

               A\Cе֣⣩
                                  Substrate Size               Arm Model                   Aligner Model          
                Wafer                 ~200mm UTC-R800pdf OFH-4102
                ~300mm

UT-AFX3000NMpdf
UTM-R3700F 

OFH-4100
EG-303 

(bH)

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